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XTREME History

1997
Fraunhofer ILT initiates research on EUV generation by electrical discharge
1999
A first-generation source is completed and a proof-of-principle demonstrated by Fraunhofer ILT
2000
Fraunhofer ILT proves high repetition rate operation is feasible with a second-generation source
2001
Royal Philips and Fraunhofer ILT join to form Philips Extreme UV. An automated third-generation source is built, soon followed by a fourth-generation source that introduces the triggering concept

Jenoptik and Lambda Physik merge their efforts in EUV and establish XTREME technologies GmbH
2002
Philips Extreme UV introduces the Xenon based alpha platform
2003
XTREME technologies announces the XTS 13-35 for integration into the EUV Microstepper of Exitech

Philips acquires the stakes of Fraunhofer ILT

Philips files basic patents for LDP

Philips and ASML decide that the Alpha Demo Tools will be powered by a tin discharge

First light of LDP prototype
2005
Ushio acquires the assets of Lambda Physik
2006
Philips EUV introduces the first EUV light source ― integrated with ASML Alpha Demo Tool (ADT) ― and demonstrates the feasibility of EUV at both SEMATECH and IMEC

XTREME technologies announces to discontinue their work on LPP and to focus on DPP
2007
XTREME technologies introduces the XTS 13 13-150 150-IF for integration in the EUV1 of Nikon

Philips EUV demonstrates feasibility of collector life-time of one year

XTREME technologies and Philips EUV announce to join forces
2008
Ushio acquires full ownership of XTREME technologies with the purchase of Jenoptik shares

Philips EUV and XTREME technologies demonstrate feasibility of LDP concept for HVM power levels
2009
XTREME technologies and Philips EUV achieve first light with their first common light source

ASML purchases this light source for integration in their NXE:3100 scanner
2010
The USHIO GROUP purchases the assets of Philips Extreme UV, then merges it with XTREME technologies

Relocation of XTREME technologies to Aachen

Official opening of the production facility in Alsdorf
2011
XTREME technologies introduces the first LDP light source ― integrated with ASML NXE:3100 ― for pilot/pre-production manufacturing

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