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Market Segments
The current sources can be differentiated according to their respective level of maturity
Beta Sources for the pre HVM (High Volume Manufacturing) market:
There are two types of sources for the pre-HVM market:
- Pre-Beta sources refer to sources that have yet to demonstrate sufficient stability and high duty cycle operation.
- Beta sources refer to sources that have demonstrated the required stability and high duty cycle operation, and are now ramping up to moderate power. This is where XTREME’s LDP currently is.
Gamma Sources for the HVM (High Volume Manufacturing) market
Gamma sources refer to sources that have demonstrated the power, the stability and the availability required to operate in an mass manufacturing environment.
| Feasibility α Source | Pre β Source | β Source | γ Source | |
| Process feasibility | XTREME Source(ADT) | N.A. | XTREME Source (NXE3100) |
XTREME Source (NXE3300) |
| Process research | ||||
| Process development | ||||
| Pilot lin | ||||
| HVM line |
| Feasibility σ Source | Pre β Source | β Source | γ Source | |
| Adoption Year | 2007 | 2010 | 2011 | 2012 |
| Target Market | Process feasibility | Process research | Process development |
HVM line |
| Pilot line | ||||
| Currently Available Source | XTREME's LDP | XTREME's LDP | ||
| Clean Power (W) | < 10 w | 100 w | 100 w | 250 W |
| Out Of Band Rad. (DUV & IR) | NA | NA | Negligible | Negligible |
| Duty Cycle (%) | None | < 70 % | > 80 % | > 80 % |
| Dose Stability (%) | None | < 0.5 % | < 0.2 % | TBD (< 0.2 %) |
